Install the linux headers:

apt-get install linux-headers-$(uname -r)

There is a bugfix for 64 bit version posted here, download this patch and install it. Tested on Workstation 7.1.0 build-261024 and 7.1.2 build-301548.

To be able to run the compilation, you need to make the following modification, which is also included in the patch file above: Within the vmmon sources, the iommu.c file has function calls to iommu_map_range and iommu_unmap_range. For the 64 bit version of Ubuntu, these calls need the '_range' suffix removed.

After installing VMware, the following commands patches the vmmon sources:

cd /tmp
tar xvf /usr/lib/vmware/modules/source/vmmon.tar -C /tmp
perl -pi -e 's,_range,,' vmmon-only/linux/iommu.c
tar cvf /usr/lib/vmware/modules/source/vmmon.tar vmmon-only

I have later decided to go back to VirtualBox, which installs without any issues.